Our rate schedule provides a number of options for your project needs, from equipment usage to full-service project consultation and support.
The rates provided below apply only to the cleanroom and materials characterization facilities. You can find rates for the Digital Manfacturing Laboratory here.
Fees & Services | Internal Academic Users | External Academic Users | Industry Users |
|---|---|---|---|
Initial Orientation / Training (per person, one-time fee for laboratory users) | $125 | $125 | $300 |
User Rates - per hour, for specific tools & equipment |
|
| |
Cleanrooms (excluding SEMs) | $25 | $25 | $100 |
Materials Characterization (excluding SEMs) Category A Equipment Category B Equipment Category C Equipment Category D Equipment |
$5 $10 $15 $25 |
$9 $18 $27 $45 |
$20 $40 $60 $100 |
(per hour, after 3 hours per project, as required) | $30 | $75 | $75 |
Project Consultation & Processing (per hour, full-service consultation & processing; fees are in addition to hourly tool usage rate, as required) | $30 | $75 | $75 |
Note: Rates and equipment categories are subject to periodic change. Laboratory and equipment fees help offset shared facilities' operating expenses (consumables; equipment maintenance, parts and replacement; equipment service contracts, etc.). Salaries of technical and administrative personnel are supported separately.
If required, our staff is available to offer up to three hours of initial technical support to your project, at no cost. Open the collapsible content below for more information including user rate information and equipment lists for cleanroom and materials characterization facilities, as well as scanning electron microscopes (SEMs).
New users are assessed an Initial Orientation / Training fee. This fee provides for hands-on orientation to facility operational (laboratory access, scheduling, general use of equipment, etc.) and safety protocols, and training on specific equipment, as needed. It also includes any future training that may be required on any equipment within our four collaborating facilities. Orientation and training is important to creating a safe and efficient experience and work environment for all users.
If required, our staff is available to provide technical / project support at no cost for an initial three hours on each project. Support is available to both academic and industry users. After three hours, the following per-hour charges will apply.
In some instances, your project may require full-service consultation and processing. If so, our staff is available to assist. In such cases, an hourly Project Consultation and Processing fee is charged in addition to hourly rates for tool usage. Below are the rates.
Use of laboratory tools and equipment is priced at hourly rates, as noted in the table above. Additional information about tools and equipment at each facility appears below.
Cleanroom equipment is priced as noted below. Note: Scanning Electron Microscopes located within the Davis Hall Electrical Engineering cleanroom are subject to a separate pricing schedule further below.
The following lists the major equipment available in the cleanroom. We also encourage you to search our equipment database to identify the tools and equipment that best meet your needs, as well as the facility location and appropriate contact.
As part of the hourly equipment rate fee, the cleanroom also provides use of additional basic tools & equipment (listed below), Personal Protective Equipment (gloves, cleanroom suit / frock, hair net, beard net, face mask, safety goggles, acid aprons, cleanroom wipes, etc.), basic chemicals (acetone, isopropyl alcohol, methanol, photoresist, developer), most metals (extra charge for Au and Pt), and other miscellaneous items (cleanroom notebooks, pens, markers, tapes, etc.).
Davis Hall Electrical Engineering Cleanroom: Furnace (tube) - LindbergBlue M™ - Thermo Electron Corp; 4-point Probe - Alessi CPS-7089-17; Probe Station - Süss MicroTec PM8; Microscopes (optical); Sputter Coater System (precious metal - gold) - SPI-Module™ (for SEM sample preparation); Ultraviolet Ozone Cleaning System - UVOCS T10x10/OES; fume hoods for sample preparation & cleaning.
Equipment in two materials characterization facilities – the Furnas Hall Materials Characterization Laboratory and the South Campus Instrument Center – is priced as noted below. All rates are per hour. Note: Scanning Electron Microscopes located within the South Campus Instrument Center are subject to a separate pricing schedule further below.
Equipment Category | Internal Academic Users | External Academic Users | Industry Users |
|---|---|---|---|
Category A | $5 | $9 | $20 |
Category B | $10 | $18 | $40 |
| Category C | $15 | $27 | $60 |
| Category D | $25 | $45 | $100 |
The following are lists of major equipment available in each materials characterization facility. We also encourage you to search our equipment database to identify the tools and equipment that best meet your needs, as well as the facility location and contact.
As part of the hourly equipment rate fee, Materials Characterization Facilities also provide use of additional basic tools and equipment (listed below).
Scanning electron microscopes are available at two facilities, the Davis Hall Cleanroom and the South Campus Instrument Center. A listing of SEMs located at each facility appears below. All rates are per hour.
Scanning Electron Microscopes | Academic Rates | Industry Rates |
|---|---|---|
SEM Imaging Only: $25 (unassisted) $35 (w/technical assistance) | SEM Imaging Only: $170 (no unassisted use permitted w/o full training) | |
e-Beam Lithography: $45 (unassisted) o first 20 hours per fiscal year $36 (unassisted) o next 30 hours per fiscal year $30 (unassisted) o beyond 50 hours per fiscal year $100 per hour (w/technical assistance) o ad-hoc e-Beam users | e-Beam Lithography: $200 (no unassisted use permitted w/o full training) | |
SEM - Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam | SEM Imaging Only: $35 (unassisted) o first 20 hours per month $25 per hour (unassisted) o second 20 hours per month $15 (unassisted) o third 20 hours per month $45 per hour (w/technical assistance) | SEM Imaging Only: $200 (assisted) $150 (unassisted) |
Focused Ion Beam: $35 (unassisted) o first 20 hours per month $25 (unassisted) o second 20 hours per month $15 (unassisted) o third 20 hours per month $45 (w/technical assistance) | Focused Ion Beam: $400
|
Scanning Electron Microscopes | Academic Rate | Industry Rate |
|---|---|---|
$20 | $150 | |
| Field Emission Scanning Electron Microscope (FESEM) - Hitachi SU70 w/Oxford Energy-dispersive X-ray Spectrometer (EDS) | $30 | $250 |
Invoices for charges are billed at the end of each month. Please consult with the appropriate facility manager to arrange billing prior to the start of your project.