Profilometer (Stylus) - Veeco Dektak®150

Metrology

Stylus profilers are used to measure surface metrology variations on flat substrates. This profilometer features an automated stage with step height, surface roughness, and film stress measurement capabilities.

Features

  •  When set to a vertical measurement range of 6.55 μm, the measurements are resolved to 1Å
  • Horizontal resolution is defined by the scan length; up to 60,000 points per scan
  • Minimum measured step height is 10 Å
  • Maximum sample thickness is 100 mm
  • Maximum substrate size is 150 mm diameter (6-inch wafers)
  • Measurable vertical range is 524 µm
  • Maximum scan length is 55 mm

Location

Electrical Engineering Cleanroom

Davis Hall, Suite 114

University at Buffalo North Campus

Buffalo, NY 14260

Fees

Learn more about our rates
Veeco D 150 Profilometer sits next to a computer near the Davis Hall Cleanroom.
For initial inquiries, contact:

Jeff Salzmann

Cleanroom Manager, Shared Instrumentation Laboratories,

Assistant professor of research

114A Davis Hall

(716) 645-2584