Microscopy & Metrology
Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam
The Carl Zeiss AURIGA CrossBeam Focused Ion Beam Electron Microscope is a state-of-the-art advanced scanning electron microscope integrated with high-resolution focused ion beam milling that enables photographic, chemical, and structural analysis of many inorganic and organic samples as well as nanoscale patterning via FIB etching or FIB-driven deposition of metals and insulators from gas-phase precursors. The system also includes TEM lift-out, Oxford EDS system, and Avizo imaging interface/software for 3D reconstruction.
Features
• Focused ion beam (FIB) pattern writing with Nanopatterning & Visualization Engine (NPVE)
• Precise preparation of cross-sectional samples for transmission electron microscopy (TEM)
• 3D tomography: 3D visualization with nanometer-scale resolution
• High resolution Field-emission-SEM and FIB imaging
• Energy-dispersive x-ray spectroscopy to analyze material composition (with nm resolution)
• Gas injection for both etching and deposition of both conducting and insulating materials
Location
Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260
Fees
Usage Fees:
SEM Imaging Only: ACADEMIC RATES
$35/hour unassisted for the first 20 hours of the month
$25/hour unassisted for the second 20 hours of the month
$15/hour unassisted for the third 20 hours of the month
$45/hour with technical assistance
INDUSTRY RATES
$200/hour assisted
$150/hour unassisted (no unassisted use permitted without full training)
Focused Ion Beam: ACADEMIC RATES
$35/hour unassisted for the first 20 hours of the month
$25/hour unassisted for the second 20 hours of the month
$15/hour unassisted for the third 20 hours of the month
$45/hour with technical assistance
INDUSTRY RATES
$400 per hour (no unassisted use permitted w/o full training)
Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam
For initial inquiries, contact:
Director, Shared Instrumentation Laboratories
(716) 645-5151
For technical inquiries, contact:
Research Assistant Professor
Sr. Research Support Specialist
(716) 645-8698